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piezoresistive sensor

1MEMS nanopositioner 1atomic force microscopy 1differential actuation 1displacement sensor 1feedthrough reduction 1folded springs 1nanopositioner 1plezoelectric actuator 1semiconductor strain gauge

1Bazaei, Ali 1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Maroufi, Mohammad 1Moheimani, S. O. Reza 1Regnier, Stephane

Date

12016 12021

Facets

1MEMS nanopositioner 1atomic force microscopy 1differential actuation 1displacement sensor 1feedthrough reduction 1folded springs 1nanopositioner 1plezoelectric actuator 1semiconductor strain gauge

1Bazaei, Ali 1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Maroufi, Mohammad 1Moheimani, S. O. Reza 1Regnier, Stephane

Date

12016 12021

Title
Creator
Date

Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
Resource Type: journal article
Date: 2021

A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors

- Maroufi, Mohammad, Moheimani, S. O. Reza

Creator: Maroufi, Mohammad , Moheimani, S. O. Reza
Resource Type: journal article
Date: 2016

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